Chemical structure of low-temperature plasma-deposited silicon nitride thin films

Chemical structure of low-temperature plasma-deposited silicon nitride thin films

Author(s):

Soh, M.T. ( Univ. of Western Australia (Australia) )
Savvides, N. ( CSIRO (Australia) )
Musca, C.A. ( Univ. of Western Australia (Australia) )
Dell, J.M. ( Univ. of Western Australia (Australia) )
Faraone, L. ( Univ. of Western Australia (Australia) )

Publication title:

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5276

Pub. Year:

2004

Page(from):

434

Page(to):

441

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451699 [081945169X]

Language:

English

Call no.:

P63600/5276

Type:

Conference Proceedings

Details

TDL ID:	ZA00013618
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Device and process technologies for MEMS, microelectronics, and photonics
Conf. info. (Number):	2003 : 3rd
Conf. info. (Venue):	Perth, Australia
Conf. info. (Date):	2003.12.10-2003.12.12

Similar Items:

1 Conference Proceedings Determination of residual stress in low-temperature PECVD silicon nitride thin films Martyniuk, M.P., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Toward MEMS-based infrared tunable microspectrometers Antoszewski, J., Dell, J.M., Shivalimar, T., Martyniuk, M., Winchester, K., Wehner, J., Musca, C.A., Faraone, L. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Mobility spectrum techniques for characterizing multilayer semiconductors structures Musca, C.A., Nguyen, T., Antoszewski, J., Redfern, D.A., Dell, J.M., Faraone, L. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Characterization of crosstalk in HgCdTe n-on-p photovoltaic infrared arrays Karp, L., Musca, C.A., Dell, J.M., Faraone, L. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Determination of mechanical properties of silicon nitride thin films using nanoindentation Martyniuk, M., Antoszewski, J., Walmsley, B. A., Musca, C. A., Dell, J. M., Jung, Y.　-G., Lawn, B. R., Huang, H., … SPIE - The International Society of Optical Engineering	9 Conference Proceedings RIE-induced n-on-p junction HgCdTe photodiodes: effects of passivant technology on bake stability Dell,J.M., Antoszewski,J., White,J.K., Pal,R., Nguyen,T., Musca,C.A., Faraone,L. SPIE-The International Society for Optical Engineering
4 Conference Proceedings HgCdTe long-wavelength infrared photovoltaic detectors formed by reactive ion etching Nguyen, T.T., Dell, J.M., Musca, C.A., Antoszewski, J., Faraone, L. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Minority carrier lifetime in abrupt MBE-grown HgCdTe heterostructures Sewell, R., Dell, J.M., Musca, C.A., Faraone, L. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Thermal Stability in HgCdTe IR Photodiodes Dell, J.M., Nguyen, T., Musca, C.A., Antoszewski, J., Faraone, L., Pal, R. Materials Research Society	11 Conference Proceedings Laser-beam-induced current technique as a quantitative tool for HgCdTe photodiode characterization Musca,C.A., Redfern,D.A., Dell,J.M., Faraone,L. SPIE - The International Society for Optical Engineering
6 Conference Proceedings The effects of vacuum baking on the I-V characteristics of LWIR HgCdTe photodiodes Nguyen, T.H., Musca, C.A., Dell, J.M., Antoszewski, J., Faraone, L. SPIE - The International Society of Optical Engineering	12 Conference Proceedings Accurate determination of composition profiles in abrupt MBE-grown HgCdTe heterostructures Sewell, R.H., Dell, J.M., Musca, C.A., Faraone, L. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12