High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine
- Author(s):
Shan, X.C. ( SIMTech (Singapore) ) Murakoshi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Wang, Z. ( SIMTech (Singapore) ) Lu, H.J. ( SIMTech (Singapore) ) Jin, Y. ( SIMTech (Singapore) ) Ikehara, T. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Wong, C.K. ( SIMTech (Singapore) ) - Publication title:
- Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5276
- Pub. Year:
- 2004
- Page(from):
- 428
- Page(to):
- 433
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451699 [081945169X]
- Language:
- English
- Call no.:
- P63600/5276
- Type:
- Conference Proceedings
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