Blank Cover Image

Atomic layer deposition (ALD) of TiO2 and Al2O3 thin films on silicon

Author(s):
Mitchell, D.R.G. ( Australian Nuclear Science and Technology Organisation (Australia) )
Triani, G. ( Australian Nuclear Science and Technology Organisation (Australia) )
Attard, D.J. ( Australian Nuclear Science and Technology Organisation (Australia) )
Finnie, K.S. ( Australian Nuclear Science and Technology Organisation (Australia) )
Evans, P.J. ( Australian Nuclear Science and Technology Organisation (Australia) )
Barbe, C.J. ( Australian Nuclear Science and Technology Organisation (Australia) )
Bartlett, J.R. ( Australian Nuclear Science and Technology Organisation (Australia) )
2 more
Publication title:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5276
Pub. Year:
2004
Page(from):
296
Page(to):
306
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
Language:
English
Call no.:
P63600/5276
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characterization of thin metal oxide films grown by atomic layer deposition

Evans, P.J., Prince, K., Triani, G., Finnie, K.S., Mitchell, D.R.G., Barbe, C.J.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Atomic Layer Chemical Vapor Deposition Of Hafnium Oxide Using Anhydrous Hafnium Nitrate Precursor

Conley J. F. Jr.,, Ono, Y., Tweet, D.J., Zhuang, W., Solanki, R.

Materials Research Society
2 Conference Proceedings Atomic layer deposition of TiO2/Ai2O3 films for optical apllications [5870-23]

Triani, G., Evans, P. J., Mitchel, D. R. G., Attard, D. J., Finnie, K. S., James, M., Hanley, T., Lafella, B., Prince, …

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Reactive Sputtering Deposition of Photocatalytic TiO₂ Thin Films on Glass Substrates

C.J. Tavares, J. Vieira, L. Rebouta, G. Hungerford, P. Coutinho

Society of Vacuum Coaters
3 Conference Proceedings Multilayer alumina and titania optical coatings prepared by atomic Iayer deposition

N. Biluš Abaffy, P. Evans, G. Triani, D. McCulloch

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Synthesis of Zirconia and Hafnia Tubes by Atomic Layer Deposition (ALD) Template Method

T.M. Abdel-Fattah, D. Gu, H. Baumgart, G. Namkoong

Electrochemical Society
4 Conference Proceedings Synthesis of Mesoporous Titanium Phosphate

Barbe, C. J., Mitchell, D. R. G., Drabarek, E., Bartlett, J. R., Woolfrey, J. L., Luca, V.

Materials Research Society
10 Conference Proceedings Controlling Fine Metal Particle Surface Reactivity with Atomic Layer Deposition (ALD)

Jeffrey R. Wank, Luis F. Hakim, Karen J. Buechler, Steven M. George, Alan Weimer

American Institute of Chemical Engineers
5 Conference Proceedings Low-temperature bonding of ceramics by Sol-Gel processing

Barbe, C. J., Cassidy, D. J., Triani, G., Latella, B. A., Mitchell, D. R. M., Day, A., Short, K., Barlett, J. R., …

MRS-Materials Research Society
11 Conference Proceedings Controlling Fine Metal Particle Surface Reactivity with Atomic Layer Deposition (ALD)

Jeffrey R. Wank, Luis F. Hakim, Karen J. Buechler, Steven M. George, Alan Weimer

American Institute of Chemical Engineers
6 Conference Proceedings Effect of Lithium Insertion on Vibrational Spectra of V205 Thin Films Deposited by Atomic Layer Deposition (ALD)

Baddour-Hadjean, R., Pereira-Ramos, J.-P., Mantoux, A.

Electrochemical Society
12 Conference Proceedings Controlling Fine Metal Particle Surface Reactivity with Atomic Layer Deposition (ALD)

Jeffrey R. Wank, Luis F. Hakim, Karen J. Buechler, Steven M. George, Alan Weimer

American Institute of Chemical Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12