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Characterization of thin metal oxide films grown by atomic layer deposition

Author(s):
Evans, P.J. ( Australian Nuclear Science and Technology Organisation (Australia) )
Prince, K. ( Australian Nuclear Science and Technology Organisation (Australia) )
Triani, G. ( Australian Nuclear Science and Technology Organisation (Australia) )
Finnie, K.S. ( Australian Nuclear Science and Technology Organisation (Australia) )
Mitchell, D.R.G. ( Australian Nuclear Science and Technology Organisation (Australia) )
Barbe, C.J. ( Australian Nuclear Science and Technology Organisation (Australia) )
1 more
Publication title:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5276
Pub. date:
2004
Page(from):
184
Page(to):
190
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
Language:
English
Call no.:
P63600/5276
Type:
Conference Proceedings

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