Blank Cover Image

The use of titanium and titanium dioxide as masks for deep silicon etching

Author(s):
  • Powell, O.J. ( Griffith Univ. (Australia) and CRC for Microtechnology (Australia) )
  • Sweatman, D. ( Griffith Univ. (Australia) and CRC for Microtechnology (Australia) )
  • Harrison, H.B. ( Griffith Univ. (Australia) and CRC for Microtechnology (Australia) )
Publication title:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5276
Pub. Year:
2004
Page(from):
26
Page(to):
35
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
Language:
English
Call no.:
P63600/5276
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Novel fiber-to-waveguide coupling method using silicon-on-insulator micromachining techniques

Ngo,N.Q., Rosa,M.A., Sweatman,D., Dimitrijev,S., Harrison,H.B., Titmarsh,A.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Rapid annealing of ion implanted silicon structures using a radiant light source

Harrison, H.B., Grigg, M., Short, K.T., Williams, J.S., Zylewicz, A.

North Holland
2 Conference Proceedings Novel U-groove channel for self-alignment of optical fibers with optical quality end-polished silicon rib waveguides using wet chemical micromachining …

Ngo,N.Q., Rosa,M.A., Sweatman,D.R., Dimitrijev,S., Harrison,H.B., Titmarsh,A.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings DIELECTRICS ON SILICON THERMALLY GROWN OR ANNEALED IN A NITROGEN RICH ENVIRONMENT

Harrison, H. B., Misiura, A., Dimitrijev, S., Sweatman, D., Yao, Z., Yeow, Y. T.

MRS - Materials Research Society
3 Conference Proceedings Model for the growth of oxides in N2O

S. Dimitrijev, H.B. Harrison, D.R. Sweatman

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Electron Transfer Dynamics in Nanocrystalline Titanium Dioxide Solar Cells Sensitized with Ruthenium and Osmium Polypyridyl Complexes

Kuciauskas, D., Freund, M., Winkler, J.R., Gray, H.B., Lewis, N.S.

Electrochemical Society
4 Conference Proceedings Improving SiO2 Grown on P-Type 4H-SiC by NO Annealing

Li,H.F., Dimitrijev,S., Harrison,H.B., Sweatman,D., Tanner,P.T.

Trans Tech Publications
10 Conference Proceedings XPS Analysis of SiO2/SiC Interface Annealed in Nitric Oxide Ambient

Li, H. -F., Dimitrijev, S., Sweatman, D., Harrison, H. B.

Trans Tech Publications
5 Conference Proceedings Growth and Nitridation of Silicon-Dioxide Films on Silicon-Carbide

Sweatman, Denis, Dimitrijev, Sima, Li, Hui-Feng, Tanner, Philip, Harrison, H. Barry

MRS - Materials Research Society
11 Conference Proceedings Nitrided Gate Dielectrics and Charge-to-Breakdown Test

Dimitrijev, S., Tanner, P., Harrison, H. B., Sweatman, D.

MRS - Materials Research Society
6 Conference Proceedings Deep reactive ion etching of silicon using an aluminum etching mask

Wang, W.-C., Ho, J.N., Reinhall, P.G.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings USING RAPID THERMAL PROCESSING TO INDUCE EPITAXIAL ALIGNMENT OF POLYCRYSTALLINE SILICON FILMS ON (100) SILICON

Harrison, H.B., Johnson, S.T., Komem, Y., Wong, C., Cohen, S.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12