Semi-automatic calibration technique using six inertial frames of reference
- Author(s):
- Lai, A. ( Swinburne Univ. of Technology (Australia) and CRC for MicroTechnology (Australia) )
- James, D.A. ( Griffith Univ. (Australia) and CRC for MicroTechnology (Australia) )
- Hayes, J.P. ( Swinburne Univ. of Technology (Australia) and CRC for MicroTechnology (Australia) )
- Harvey, E.C. ( Swinburne Univ. of Technology (Australia) and CRC for MicroTechnology (Australia) )
- Publication title:
- Microelectronics: Design, Technology, and Packaging
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5274
- Pub. Year:
- 2004
- Page(from):
- 531
- Page(to):
- 542
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451675 [0819451673]
- Language:
- English
- Call no.:
- P63600/5274
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Characterization of kinematics data from a 1-axis MEMS acceleration sensor for short term navigation
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Excimer laser ablation used for the fabrication of micro-optic phase and diffraction elements
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Effect of plume dynamics on the uniformity of excimer laser ablation for microfabrication
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Laser ablation and lift-off technique for fabricating simple microfluidic devices
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Laser micromachining and nickel plating of high-aspect-ratio structures in polymer molds
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Simulation of excimer laser micromachined 3D surface using a CAD solid modeling package
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Spatially controlled surface chemistry by excimer laser ablation of thin films
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Real-time monitoring of excimer laser ablation of multilayer thin films by detecting acoustic emission
SPIE-The International Society for Optical Engineering |