Thickness and composition monitoring of thin layers of InGaAs in InP/InGaAsP epitaxial growths using FESEM and integrated SIMS profiles

Thickness and composition monitoring of thin layers of InGaAs in InP/InGaAsP epitaxial growths using FESEM and integrated SIMS profiles

Author(s):

Masson, D.P. ( MetroPhotonics Inc. (Canada) )
Humphreys, B. ( MetroPhotonics Inc. (Canada) )
Robertson, M. ( Acadia Univ. (Canada) )

Publication title:

Applications of photonic technology 6 : closing the gap between theory, development, and application : Photonics North 2003

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5260

Pub. Year:

2003

Page(from):

463

Page(to):

469

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451484 [0819451487]

Language:

English

Call no.:

P63600/5260

Type:

Conference Proceedings

Details

TDL ID:	ZA00013605
Series ID:	PA00000029
Conf. info. (Name):	ICAPT : International Conference on Applications of Photonic Technology : Photonics North
Conf. info. (Number):	2003 : 6th
Conf. info. (Venue):	Montreal, QC, Canada
Conf. info. (Date):	2003.05.25-2003.05.29

Similar Items:

1 Conference Proceedings Surface roughness and dislocation density in InP/InGaAs layers (Invited Paper) Masson, D. P., Laframboise, S. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Growth and Realization of InGaAs/InP and InGaAs/InGaAsP Quantum Photonic Devices Grown by Chemical Beam Epitaxy Rigo,C., Cacciatore,C., Campi,D., Coriasso,C., Soldani,D., Stano,A. Trans Tech Publications
2 Conference Proceedings CHARACTERIZATION OF InGaAs/InP EPITAXIAL LAYERS GROWN OVER V-GROOVE PATTERNED InP SUBSTRATES USING GAS SOURCE MOLECULAR BEAM EPITAXY Bulitka, N. J., Gupta, A., Robinson, B. J., Thompson, D. A., Weatherly, G. C., Simmons, J. G. MRS - Materials Research Society	8 Conference Proceedings MBE GROWTH AND CHARACTERIZATION OF SixGe1-x MULTILAYER STRUCTURES ON Si(100) FOR USE AS A SUBSTRATE FOR GaAs HETEROEPITAXY Posthill, J.B., Malta, D.P., Venkatasubramanian, R., Sharps, P.R., Timmons, M.L., Markunas, R.J., Humphreys, T.P., … Materials Research Society
3 Conference Proceedings Effects of YTTERBIUM addition on liquid phase epitaxial growth of InGaAs/InP heterostructures Davis, A., Dauplaise, H. M., Lorenzo, J. P., Ramseyer, G. O., Horrigan, J. A. MRS - Materials Research Society	9 Conference Proceedings Room-temperature cw operation of InGaAsP/InP microdisk lasers Courtney,D., O'Brien,P., Skovgaard,P.M.W., McInerney,J.G., Corbett,B. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Synthesis of high-quality InGaAs/InGaAsP/InP quantum well structures by metalorganic vapor phase epitaxy Arora,B.M., Gokhale,M., Shah,A.P., Chandrasekharan,K.S. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Liquid-phase epitaxial growth process of InGaAs on InP with rare-earth treatment Gao,W., Berger,P.R., Hunsperger,R.G., Pamulapati,J., Lareau,R.T. SPIE-The International Society for Optical Engineering
5 Conference Proceedings PREPARATION OF InP SURFACES FOR EPITAXIAL GROWTH AND REGROWTH Hollinger, G., Besland, M. P., Gallet, D., Gendry, M. MRS - Materials Research Society	11 Conference Proceedings Growth and Characterization of InGaAs/InP Quantum Wells Bose,D.N., Banerji,P., Pal,D. SPIE - The International Society for Optical Engineering
6 Conference Proceedings InGaAsP digital optical switch on InP Barrios, P., Poole, P.J., Buchanan, M., Chow-Chong, P., Golub, I., Lacelle, C., Syrett, B.A., Abdalla, S., El-Mougy, … SPIE-The International Society for Optical Engineering	12 Conference Proceedings Epitaxial Growth of Oxide Thin Films on (001) Metal Surfaces Using Pulsed Laser Deposition Norton, D. P., Park, C., Saffian, B., Budai, J. D., Goyal, A., Christen, D. K., Kroeger, D. M., Lee, D., He, Q., … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12