Beyond k1=0.25 lithography: 70-nm L/S patterning using KrF scanners

Beyond k1=0.25 lithography: 70-nm L/S patterning using KrF scanners

Author(s):

Ebihara, T. ( Canon USA, Inc. (USA) )

Levenson, M.D. ( M.D. Levenson Consulting (USA) )

Liu, W. ( Applied Materials Inc. (USA) )

He, J. ( Applied Materials Inc. (USA) )

Yeh, W. ( Applied Materials Inc. (USA) )

Ahn, S. ( Applied Materials Inc. (USA) )

Oga, T. ( Canon USA, Inc. (USA) )

Shen, M. ( Applied Materials Inc. (USA) )

M'saad, H. ( Applied Materials Inc. (USA) )

4 more

Publication title:

23rd Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5256

Pub. Year:

2003

Page(from):

985

Page(to):

994

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451439 [0819451436]

Language:

English

Call no.:

P63600/5256.2

Type:

Conference Proceedings

Details

TDL ID:	ZA00013601
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2003 : 23rd
Conf. info. (Venue):	Monterey, California, USA
Conf. info. (Date):	2003.09.09-2003.09.12

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