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Study of alternating phase-shift mask structure for 65-nm node devices

Author(s):
Konishi, T. ( Toppan Printing Co., Ltd. (Japan) )
Komizo, T. ( Toppan Printing Co., Ltd. (Japan) )
Takahashi, H. ( Toppan Printing Co., Ltd. (Japan) )
Morita, M. ( Toppan Printing Co., Ltd. (Japan) )
Ohshima, T. ( Toppan Printing Co., Ltd. (Japan) )
Chiba, K. ( Toppan Printing Co., Ltd. (Japan) )
Kojima, Y. ( Toppan Printing Co., Ltd. (Japan) )
Sasaki, J. ( Toppan Printing Co., Ltd. (Japan) )
Tanaka, K. ( Toppan Printing Co., Ltd. (Japan) )
Otaki, M. ( Toppan Printing Co., Ltd. (Japan) )
Okuda, Y. ( Toppan Printing Co., Ltd. (Japan) )
6 more
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
880
Page(to):
888
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.2
Type:
Conference Proceedings

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