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Optimization of chrome dry etch in Tetra II using asymmetrically loaded patterns

Author(s):
Brooks, C.B. ( Applied Materials, Inc. (USA) )
Anderson, R.B., III ( Applied Materials, Inc. (USA) )
Clevenger, J.O. ( Applied Materials, Inc. (USA) )
Collard, C. ( Applied Materials, Inc. (USA) )
Halim, M. ( Applied Materials, Inc. (USA) )
Sahin, T. ( Applied Materials, Inc. (USA) )
Mak, A.W. ( Applied Materials, Inc. (USA) )
2 more
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
749
Page(to):
757
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.2
Type:
Conference Proceedings

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