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Plasma and flow modeling of photomask etch chambers

Author(s):
  • Hammond, E. ( Etec Systems, Inc., an Applied Materials Co. (USA) )
  • Clevenger, J.O. ( Etec Systems, Inc., an Applied Materials Co. (USA) )
  • Buie, M.J. ( Etec Systems, Inc., an Applied Materials Co. (USA) )
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
713
Page(to):
723
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.2
Type:
Conference Proceedings

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