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Properties of a 248-nm DUV laser mask pattern generator for the 90-nm and 65-nm technology nodes

Author(s):
Aman, J. ( Micronic Laser Systems AB (Sweden) )
Fosshaug, H.A. ( Micronic Laser Systems AB (Sweden) )
Hedqvist, T. ( Micronic Laser Systems AB (Sweden) )
Harkesjo, J. ( Micronic Laser Systems AB (Sweden) )
Hogfeldt, P. ( Micronic Laser Systems AB (Sweden) )
Jacobsson, M. ( Micronic Laser Systems AB (Sweden) )
Karawajczyk, A. ( Micronic Laser Systems AB (Sweden) )
Karlsson, J. ( Micronic Laser Systems AB (Sweden) )
Rosling, M. ( Micronic Laser Systems AB (Sweden) )
Sjoberg, H.J. ( Micronic Laser Systems AB (Sweden) )
5 more
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
684
Page(to):
694
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.1
Type:
Conference Proceedings

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