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Fabrication of programmed phase defects on EUV multilayer blanks

Author(s):
Kinoshita, T. ( HOYA Corp. (Japan) )
Shoki, T. ( HOYA Corp. (Japan) )
Kobayashi, H. ( HOYA Corp. (Japan) )
Ohkubo, R. ( HOYA Corp. (Japan) )
Usui, Y.-I. ( HOYA Corp. (Japan) )
Hosoya, M. ( HOYA Corp. (Japan) )
Sakaya, N. ( HOYA Corp. (Japan) )
Nagarekawa, O. ( HOYA Corp. (Japan) )
3 more
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
595
Page(to):
606
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.1
Type:
Conference Proceedings

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