Immersion system process optimization for 248-nm and 193-nm photomasks: binary and EAPSM
- Author(s):
Chen, G. ( Akrion, LLC (USA) ) Reyes, J. ( DuPont Photomasks, Inc. (USA) ) Wood, J.L. ( DuPont Photomasks, Inc. (USA) ) Kashkoush, I. ( Akrion, LLC (USA) ) Dieu, L. ( DuPont Photomasks, Inc. (USA) ) Novak, R. ( Akrion, LLC (USA) ) - Publication title:
- 23rd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5256
- Pub. Year:
- 2003
- Page(from):
- 518
- Page(to):
- 525
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- Language:
- English
- Call no.:
- P63600/5256.1
- Type:
- Conference Proceedings
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