Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer
- Author(s):
- Voznesensky, N.B. ( VTT Optik Ltd. (Estonia) )
- Lee, K.-H. ( Korea Electrotechnology Research Institute (South Korea) )
- Kirillovsky, V.K. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
- Publication title:
- Optical fabrication, testing, and metrology : 30 September-3 October 2003, St. Etienne, France
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5252
- Pub. Year:
- 2004
- Page(from):
- 241
- Page(to):
- 251
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451361 [0819451363]
- Language:
- English
- Call no.:
- P63600/5252
- Type:
- Conference Proceedings
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