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Effect of substrate temperature on optical properties of EB-PVD-deposited silicon oxynitride thin films

Author(s):
Mohite, K.C. ( Univ. of Pune (India) )
Nouveau, C. ( Ecole Nationale Superieure d'Arts et Metiers (France) )
Pawar, S.T. ( Univ. of Pune (India) )
Pawar, B.N. ( Univ. of Pune (India) )
Jadkar, S.R. ( Univ. of Pune (India) )
Takwale, M.G. ( Univ. of Pune (India) )
1 more
Publication title:
Advances in optical thin films : 30 September-3 October 2003, St. Etienne, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5250
Pub. Year:
2004
Page(from):
676
Page(to):
690
Pages:
15
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451347 [0819451347]
Language:
English
Call no.:
P63600/5250
Type:
Conference Proceedings

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