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EUV and soft x-ray multilayer optics

Author(s):
  • Kaiser, N. ( Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany) )
  • Yulin, S. ( JENOPTIK Laser, Optik, Systeme GmbH (Germany) )
  • Feigl, T. ( JENOPTIK Laser, Optik, Systeme GmbH (Germany) )
  • Bernitzki, H. ( JENOPTIK Laser, Optik, Systeme GmbH (Germany) )
  • Lauth, H. ( JENOPTIK Laser, Optik, Systeme GmbH (Germany) )
Publication title:
Advances in optical thin films : 30 September-3 October 2003, St. Etienne, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5250
Pub. Year:
2004
Page(from):
109
Page(to):
118
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451347 [0819451347]
Language:
English
Call no.:
P63600/5250
Type:
Conference Proceedings

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