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Near-field detection of the quality of high-density gratings with nanotechnology

Author(s):
  • Xi, P. ( Shanghai Institute of Optics and Fine Mechanics (China) )
  • Zhou, C. ( Shanghai Institute of Optics and Fine Mechanics (China) )
  • Luo, H. ( Shanghai Institute of Optics and Fine Mechanics (China) )
  • Dai, E. ( Shanghai Institute of Optics and Fine Mechanics (China) )
  • Liu, L. ( Shanghai Institute of Optics and Fine Mechanics (China) )
Publication title:
Nano- and micro-optics for information systems : 3-4 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5225
Pub. Year:
2003
Page(from):
140
Page(to):
144
Pages:
5
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450982 [0819450987]
Language:
English
Call no.:
P63600/5225
Type:
Conference Proceedings

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