Considerations of optical microlens-array design for nano-MEMS-based optical switch arrays

Considerations of optical microlens-array design for nano-MEMS-based optical switch arrays

Author(s):

Tsao, S.-L. ( National Taiwan Normal Univ. (Taiwan) )
Cheng, W.-M. ( National Taiwan Normal Univ. (Taiwan) )
Lu, C.-J. ( Yuan Ze Univ. (China) )

Publication title:

Nanofabrication Technologies

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5220

Pub. Year:

2003

Page(from):

99

Page(to):

107

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819450937 [0819450936]

Language:

English

Call no.:

P63600/5220

Type:

Conference Proceedings

Details

TDL ID:	ZA00013574
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Nanofabrication Technologies
Conf. info. (Number):	2003
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2003.08.03-2003.08.04

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