Wave-optical considerations in photolithography
- Author(s):
- Wong, A.K. ( Fortis Systems, Inc. (USA) )
- Pierrat, C. ( Fortis Systems, Inc. (USA) )
- Publication title:
- Wave-optical wywtems engineering II : 3-4 August 2003, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5182
- Pub. Year:
- 2003
- Page(from):
- 63
- Page(to):
- 72
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450555 [0819450553]
- Language:
- English
- Call no.:
- P63600/5182
- Type:
- Conference Proceedings
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