Time-resolved measurement of surface displacement in excimer laser ablation of Si

Time-resolved measurement of surface displacement in excimer laser ablation of Si

Author(s):

Ooie, T. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Asada, S. ( Mitsubishi Electric Corp. (Japan) )
Miyamoto, I. ( Osaka Univ. (Japan) )

Publication title:

Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5063

Pub. Year:

2003

Page(from):

333

Page(to):

337

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819448699 [0819448699]

Language:

English

Call no.:

P63600/5063

Type:

Conference Proceedings

Details

TDL ID:	ZA00013528
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2003 : 4th
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2003.06.21-2003.03.24

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