Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)
- Author(s):
- Ding, X. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
- Kawaguchi, Y. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
- Sato, T. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
- Narazaki, A. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
- Niino, H. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
- Publication title:
- Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5063
- Pub. Year:
- 2003
- Page(from):
- 118
- Page(to):
- 123
- Pages:
- 6
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448699 [0819448699]
- Language:
- English
- Call no.:
- P63600/5063
- Type:
- Conference Proceedings
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