Polysilicon piezoresistive pressure sensor using silicon-on-insulator (SOI) approach

Polysilicon piezoresistive pressure sensor using silicon-on-insulator (SOI) approach

Author(s):

Bhat, K.N.H. ( Indian Institute of Technology, Madras (India) )

Bhattacharya, E. ( Indian Institute of Technology, Madras (India) )

DasGupta, A. ( Indian Institute of Technology, Madras (India) )

DasGupta, N. ( Indian Institute of Technology, Madras (India) )

KotiReddy, B.R. ( Indian Institute of Technology, Madras (India) )

Rao, P.R. ( Indian Institute of Technology, Madras (India) )

Balasubramaniam, K. ( Indian Institute of Technology, Madras (India) )

2 more

Publication title:

Smart Materials, Structures, and Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5062

Pub. Year:

2003

Page(from):

853

Page(to):

862

Pages:

10

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819448682 [0819448680]

Language:

English

Call no.:

P63600/5062.2

Type:

Conference Proceedings

Details

TDL ID:	ZA00013527
Series ID:	PA00000029
Conf. info. (Name):	Smart materials, structures, and systems
Conf. info. (Number):	2002
Conf. info. (Venue):	Bangalore, India
Conf. info. (Date):	2002.12.12-2002.12.14

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