Design and analysis of micro-optic-electro-mechanical accelerometer
- Author(s):
- Nayak, J. ( Research Ctr. Imarat (India) )
- Srinivas, T. ( Indian Institute of Science (India) )
- Selvarajan, A. ( Indian Institute of Science (India) )
- Sastry, D.V.K. ( Research Ctr. Imarat (India) )
- Unnikrishanan, M.P. ( Research Ctr. Imarat (India) )
- Publication title:
- Smart Materials, Structures, and Systems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5062
- Pub. Year:
- 2003
- Page(from):
- 773
- Page(to):
- 779
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819448682 [0819448680]
- Language:
- English
- Call no.:
- P63600/5062.2
- Type:
- Conference Proceedings
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