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Capacitive pressure sensor for MEMS

Author(s):
  • Gupta, A. ( Solid State Physics Lab. (India) )
  • Ahmad, A. ( Solid State Physics Lab. (India) )
  • Singh, R. ( Solid State Physics Lab. (India) )
Publication title:
Smart Materials, Structures, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5062
Pub. Year:
2003
Page(from):
450
Page(to):
454
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448682 [0819448680]
Language:
English
Call no.:
P63600/5062.1
Type:
Conference Proceedings

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