Integrated piezoelectric thin films for microactuators

Integrated piezoelectric thin films for microactuators

Author(s):

Krupanidhi, S.B. ( Indian Institute of Science (India) )
Laha, A. ( Indian Institute of Science (India) )

Publication title:

Smart Materials, Structures, and Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5062

Pub. Year:

2003

Page(from):

147

Page(to):

153

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819448682 [0819448680]

Language:

English

Call no.:

P63600/5062.1

Type:

Conference Proceedings

Details

TDL ID:	ZA00013526
Series ID:	PA00000029
Conf. info. (Name):	Smart materials, structures, and systems
Conf. info. (Number):	2002
Conf. info. (Venue):	Bangalore, India
Conf. info. (Date):	2002.12.12-2002.12.14

Similar Items:

1 Conference Proceedings Compositionally and structurally modulated Pb(Mg1/3Nb2/3)O3-PbTiO3 relaxor thin films for microactuator application Laha, A., Krupanidhi, S.B. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Study of Laser Ablated (Pb, La) TiO3 Feroelectric Thin Films For Pyroelectric Applications Venkateswarlu, P., Krupanidhi, S.B. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Integrated Ba(Sn,Ti)O3 films for microactuator applications Halder, S., Krupanidhi, S.B. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Pyroelectric properties of laser ablated lanthanum-doped lead titanate thin films for smart sensors Venkateswarlu, P., Banerjee, A., Krupanidhi, S.B. SPIE - The International Society of Optical Engineering
3 Conference Proceedings Analysis of Alternating Current Conduction and Impedance Spectroscopy Study of BaBi2Nb2O9 Thin Films Laha, Apurba, Saha, S., Krupanidhi, S.B. Materials Research Society	9 Conference Proceedings FERROELECTRIC THIN FILMS AND DEVICE APPLICATIONS Krupanidhi B. S. Kluwer Academic Publishers
4 Conference Proceedings Impact of Template Layers on Dielectric and Electrical Properties of Pulsed-Laser Ablated Pb(Mg1/3Nb2/3)O3 -PbTiO3 Thin Films Laha, Apurba, Saha, S., Krupanidhi, S.B. Materials Research Society	10 Conference Proceedings LOW ENERGY ION BOMBARDMENT INDUCED EFFECTS IN MULTI-COMPONENT ELECTROCERAMIC THIN FILMS Krupanidhi B. S. Kluwer Academic Publishers
5 Conference Proceedings Dielectric Properties of Pulsed Excimer Laser Ablated BaBi2Nb2O9 Thin Films Laha, Apurba, Krupanidhi, S. B., Saha, S. Materials Research Society	11 Conference Proceedings Dielectric and Ferroelectric Studies of Pb0.85La0.15TiO3 Thin Films on Solution Derived RuO2 Bottom Electrodes Bhaskar, S., Majumder, S.B., Dobal, P.S., Krupanidhi, S.B., Katiyar, R.S. Materials Research Society
6 Conference Proceedings Field Induced Dielectric Properties of 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 Thin Films Laha, Apurba, Saha, S., Krupanidhi, S. B. Materials Research Society	12 Conference Proceedings RF MAGNETRON SPUTTER DEPOSITION AND CHARACTERIZATION OF ALUMINUM NITRIDE THIN FILMS Krupanidhi, Saluru B Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12