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The analysis of line profile in laser direct writing process

Author(s):
  • Xie, Y. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Lu, Z. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Li, F. ( Changchun Institute of Optics and Fine Mechanics (China) )
  • Weng, Z. ( Changchun Institute of Optics and Fine Mechanics (China) )
Publication title:
19th Congress of the International Commission for Optics: Optics for the Quality of Life
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4829
Pub. Year:
2003
Page(from):
686
Page(to):
687
Pages:
2
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819445964 [0819445967]
Language:
English
Call no.:
P63600/4829.2
Type:
Conference Proceedings

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