A silicon based MEMS technology for electrostatically actuated SPDT RF switches

A silicon based MEMS technology for electrostatically actuated SPDT RF switches

Author(s):

Armaroli, C. ( ITC-IRST, Povo Trento, Italy )

Ferrario, L. ( ITC-IRST, Povo Trento, Italy )

Giacomozzi, F. ( ITC-IRST, Povo Trento, Italy )

Lorenzelli, L. ( ITC-IRST, Povo Trento, Italy )

Margesin, B. ( ITC-IRST, Povo Trento, Italy )

Rangra, K. ( Solid State Physics Laboratory, Delhi, India )

Tommaso, G. ( Alenia Spazio, Roma, Italy )

2 more

Publication title:

Proceedings of the European Space Components Conference, ESCCON 2002, 24-27 September 2002, Toulouse, France

Title of ser.:

ESA SP

Ser. no.:

507

Pub. Year:

2002

Page(from):

41

Page(to):

48

Pages:

8

Pub. info.:

Noordwijk, The Netherlands: ESA Publications Division

ISSN:

03796566

ISBN:

9789290928171 [9290928174]

Language:

English

Call no.:

E11690/507

Type:

Conference Proceedings

Details

TDL ID:	ZA00013503
Series ID:	PA00000009
Conf. info. (Name):	European Space Components Conference : ESCCON 2002
Conf. info. (Number):	2002
Conf. info. (Venue):	Toulouse, France
Conf. info. (Date):	2002.09.24-2002.09.27

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