Blank Cover Image

Optimisation of a Home-Made RIE System - Effect of SF6 Plasma on the Properties of Partially Etched a-Si:H Films

Author(s):
Publication title:
Advanced materials forum II : proceedings of the II International Materials Symposium, Materiais 2003 and XI Encontro Sociedade Portugesa de Materiais - SPM, Campus da Caparica, April 14-16, Caparica, Portugal, 2003
Title of ser.:
Materials science forum
Ser. no.:
455-456
Pub. date:
2004
Page(from):
124
Page(to):
127
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499410 [0878499415]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

Lavareda, G., Nunes de Carvalho, C., Amaral, A., Fortunato, E.

Trans Tech Publications

Gordo, P.M., Duarte Naia, M., Lopes Gil, C., de Lima, A.P., Lavareda, G., Nunes de Carvalho, C., Amaral, A., Kajcsos, …

Trans Tech Publications

Amaral, A., Carvalho, C. Nunes de, Brogueira, P., Melo, L.V., Lavareda, G., Godinho, M.H.

Materials Research Society

Amaral, A., Carvalho, C. N., Fernes, M., Lavareda, G., Louro, P., Schwarz, R., Vieira, M., Vygranenko, Y.

Materials Research Society

Gordo, P.M., Subrahmanyam, V.S., Naia, M.D, Gil, C.L, de Lima, A.P., Lavareda, G., de Carvalho, C.N, Amaral, A.

Trans Tech Publications

Fortunato, E., Goncalves, A., Carvalho, C.Nunes de, Pimentel, A., Lavareda, G., Marques, A., Martins, R.

Materials Research Society

Lavareda, G., Fortunato, E., Carvalho, C. Nunes, Martins, R.

MRS - Materials Research Society

Louro, P., Fernandes, M., Fantoni, A., Macarico, A., Carvalho, C.Nunes de, Lavareda, G., Vieira, M.

Materials Research Society

Bessergenev, K. G., Pereira, R. J. F., Mateus, M. C., Vasconcelos, D. A., Botelho, A. M., Rego, do

Electrochemical Society

Louro, P., Vieira, M., Fantoni, A., Fernandes, M., Carvalho, C.Nunes de, Lavareda, G.

Materials Research Society

Amaral, A, Lavareda, G., Carvalho, C. Nunes de, Brogueira, P., Gordo, P.M., Subrahmanyam, V.S., Gil, C. Lopes, Naia, M. …

Materials Research Society

Miguel Fernandes, João Costa, Manuela Vieira, C. N. Carvalho, G. Lavareda, Amin Karmali

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12