Blank Cover Image

Characteristics of ZnO Thin Film by Atomic Layer Deposition for Film Bulk Acoustic Resonator

Author(s):
Publication title:
Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003
Title of ser.:
Materials science forum
Ser. no.:
449-452
Pub. Year:
2004
Page(from):
977
Page(to):
980
Pages:
4
Pub. info.:
Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499397 [0878499393]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Characteristics of ZrO2/Al2O3 Bilayer Film for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method

Kim, Y.D., Lee, J.H., Koo, J.H, Chang, H.J., Jeon, H.T.

Trans Tech Publications
7 Conference Proceedings Low-k SiBN (Silicon Boron Nitride) Film Synthesized by a Plasma-Assisted Atomic Layer Deposition

S. Yang, J. Kim, J. Noh, H. Kim, S. Lee, J. Ahn, K. Hwang, Y. Shin, U. Chung, J. Moon, D. Lee, I. Yi, R. Jung, S. Kang

Electrochemical Society
2 Conference Proceedings Fabrication of Oxide/Semiconducting Coaxial Nanotubular Materials Using Atomic Layer Deposition

Jeong, D.K., Park, N.H., Jung, S.H., Jung, W.G., Shin, H., Lee, J.G., Kim, J.Y.

Trans Tech Publications
8 Conference Proceedings Electrical Properties of the La2O3/4H-SiC Interface Prepared by Atomic Layer Deposition Using La(iPrCp)3 and H2O

Moon, J.H., Eom, D.I., No, S.Y., Song, H.K., Yim, J.H., Na, H.J., Lee, J.B., Kim, H.J.

Trans Tech Publications
3 Conference Proceedings Application of Field-Enhanced Rapid Thermal Annealing to Activation of Doped Polycrystalline Si Thin Films

So, B.S., You, Y.H., Kirn, H.J., Kim, Y.H., Hwang, J.H., D.H. Shin,, Ryu, S.R., Choi, K., Kim, Y.C.

Materials Research Society
9 Conference Proceedings Characteristics of the HfO₂ Thin Films Grown by Remote Plasma Atomic Layer Deposition Method on the Plasma Oxidized Si Substrate

H. Kong. S. Kim, J. Kim, J. Choi, H. Jeon, C. Bae

Electrochemical Society
4 Conference Proceedings Impact of Stacking Fault on the I-V Characteristics of 4H-SiC Schottky Barrier Diode

H.J. Jung, S.B. Yun, I.H. Kang, J.H. Moon, W.J. Kim

Trans Tech Publications
10 Conference Proceedings Oriented Growth of ZnO Thin Films on SiC Buffered Si(001) Substrates by Pulsed Laser Deposition

Yoo, C.J., Shim, Y.A., Moon, J.H., Kim, S.S., Lee, B.T., Kim, J.H.

Trans Tech Publications
5 Conference Proceedings Effects of Post-Annealing on the Electrical and Optical Properties of ZnO Thin Films Grown on Al2O3 Substrates by Atomic Layer Epitaxy

C.M. Lee, Y.J. Cho, H.J. Kim, W.W. Lee, H.W. Kim, C.K. Hwangbo, J.G. Lee

Trans Tech Publications
11 Conference Proceedings Comparison of the structural characteristics and surface morphology of ZnO thin films grown on various substrates by pulsed laser deposition

Kim, J.H., Lee, K., Lee, C.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Evaluation of Novel Sr Precursors for Atomic Layer Deposition of SrO Thin Film

K. Kim, K. Cho, K. Lee, Y. Kim, J.H. Choi

Electrochemical Society
12 Conference Proceedings Synthesis of CNTs/Metal/Al2O3 Nanocomposite Powders by Chemical Vapor Deposition

Park, C.D., Jeon, H.J., Wang, H.J., Choa, Y.H., Oh, S.T., Kang, K.M., Kang, S.G.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12