Plasma Etching for Fabricating the Concave-Type DRAM Capacitors
- Author(s):
- Kim, H.W.
- Publication title:
- Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003
- Title of ser.:
- Materials science forum
- Ser. no.:
- 449-452
- Pub. Year:
- 2004
- Page(from):
- 353
- Page(to):
- 356
- Pages:
- 4
- Pub. info.:
- Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499397 [0878499393]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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