Single Material Ohmic Contacts Simultaneously Formed on the Source/P-Well/Gate of 4H-SiC Vertical MOSFETs
- Author(s):
Kiritani, N. Hoshi, M. Tanimoto, S. Adachi, K. Nishizawa, S.-i. Yatsuo, T. Okushi, H. Arai, K. - Publication title:
- Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden
- Title of ser.:
- Materials science forum
- Ser. no.:
- 433-436
- Pub. Year:
- 2003
- Page(from):
- 669
- Page(to):
- 672
- Pages:
- 4
- Pub. info.:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499205 [0878499202]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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