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High-Resolution XRD Investigations of the Strain Reduction in 3C-SiC Thin Films Grown on Si (111) Substrates

Author(s):
Weih, P.
Cimalla, V.
Forster, C.
Pezoldt, J.
Stauden, Th.
Spiess, L.
Romanus, H.
Hermann, M.
Eickhoff, M.
Masri, P.
Ambacher, O.
6 more
Publication title:
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden
Title of ser.:
Materials science forum
Ser. no.:
433-436
Pub. Year:
2003
Page(from):
233
Page(to):
236
Pages:
4
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499205 [0878499202]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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