Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier Diodes

Complete Micropipe Dissociation in 4H-SiC(03-38) Epitaxial Growth and its Impact on Reverse Characteristics of Schottky Barrier Diodes

Author(s):

Publication title:

Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden

Title of ser.:

Materials science forum

Ser. no.:

433-436

Pub. Year:

2003

Page(from):

197

Page(to):

200

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499205 [0878499202]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013351
Series ID:	PA00000012
Conf. info. (Name):	ECSCRM : European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2002 : 4th
Conf. info. (Venue):	Linköping, Sweden
Conf. info. (Date):	2002.09.02-2002.09.05

Similar Items:

1 Conference Proceedings Epitaxial Growth and Characterization of 4H-SiC(11-20) and (03-38) Kimoto, T., Hashimoto, K., Fujihira, K., Danno, K., Nakamura, S., Negoro, Y., Matsunami, H. Materials Research Society	7 Conference Proceedings 4H-SiC MOSFETs on (03-38) Face Hirao, T., Yano, H., Kimoto, T., Matsunami, H., Shiomi, H. Trans Tech Publications
2 Conference Proceedings Reduction of Stacking Faults in Fast Epitaxial Growth of 4H-SiC and its Impacts on High-Voltage Schottky Diodes Fujiwara, H., Kimoto, T., Tojo, T., Matsunami, H. Trans Tech Publications	8 Conference Proceedings 4H-SiC MOSFETs on (03-38) Face Hirao, T., Yano, H., Kimoto, T., Matsunami, H., Shiomi, H. Trans Tech Publications
3 Conference Proceedings Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications	9 Conference Proceedings The Development of 4H-SiC {03-38} Wafers Nakayama, K., Miyanagi, Y., Shiomi, H., Nishino, S., Kimoto, T., Matsunami, H. Trans Tech Publications
4 Conference Proceedings Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications	10 Conference Proceedings The Development of 4H-SiC {03-38} Wafers Nakayama, K., Miyanagi, Y., Shiomi, H., Nishino, S., Kimoto, T., Matsunami, H. Trans Tech Publications
5 Conference Proceedings Fast Epitaxial Growth of High-Quality 4H-SiC by Vertical Hot-Wall CVD Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications	11 Conference Proceedings Growth of Micropipe Free Crystals on 4H-SiC {03-38} Seeds Furusho, T., Kobayashi, R., Nishiguchi, T., Sasaki, M., Hirai, K., Hayashi, T., Kinoshita, H., Shiomi, H. Trans Tech Publications
6 Conference Proceedings High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(000-1) Face Danno, K., Kimoto, T., Matsunami, H. Trans Tech Publications	12 Conference Proceedings High Temperature Deep Level Transient Spectroscopy Investigations of n-Type 4H-SiC Epitaxial Layers Schoner, A., Fujihira, K., Kimoto, T., Matsunami, H. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12