Growth of Phosphorus-Doped 6H-SiC Single Crystals by the Modified Lely Method

Growth of Phosphorus-Doped 6H-SiC Single Crystals by the Modified Lely Method

Author(s):

Semmelroth, K.

Publication title:

Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden

Title of ser.:

Materials science forum

Ser. no.:

433-436

Pub. Year:

2003

Page(from):

63

Page(to):

66

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499205 [0878499202]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013351
Series ID:	PA00000012
Conf. info. (Name):	ECSCRM : European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2002 : 4th
Conf. info. (Venue):	Linköping, Sweden
Conf. info. (Date):	2002.09.02-2002.09.05

Similar Items:

1 Conference Proceedings Growth of Highly Aluminum-Doped p-type 6H-SiC Single Crystals by the Modified Lely Method Schulze, N., Gajowski, J., Semmelroth, K., Laube, M., Pensl, G. Trans Tech Publications	7 Conference Proceedings Electrical and Optical Characterization of SiC Pensl, G., Schmid, F., Ciobanu, F., Laube, M., Reshanov, S.A., Schulze, N., Semmelroth, K., Nagasawa, H., Schoner, A., … Trans Tech Publications
2 Conference Proceedings Ionization Energies of Phosphorus Donors in 6H-SiC F. Schmid, K. Semmelroth, M. Krieger, H.B. Weber, G. Pensl Trans Tech Publications	8 Conference Proceedings Controlled Growth of Bulk 15R-SiC Single Crystals by the Modified Lely Method Schulze, N., Barrett, D., Weidner, M., Pensl, G. Trans Tech Publications
3 Conference Proceedings New Aspects in n-type Doping of SiC with Phosphorus Rauls, E., Gerstmann, U., Greulich-Weber, S., Semmelroth, K., Pensl, G., Haller, E.E. Trans Tech Publications	9 Conference Proceedings Microstructure of Cubic SiC Grown by the Modified Lely-Method Nerding, M., Semmelroth, K., Pensl, G., Nagasawa, H., Strunk, H.P. Trans Tech Publications
4 Conference Proceedings Impurity Conduction Observed in Al-Doped 6H-SiC Krieger, M., Semmelroth, K., Pensl, G. Trans Tech Publications	10 Conference Proceedings Study of the Temperature Induced Polytype Conversion in Cubic CVD SiC by Raman Spectroscopy Puesche, R., Hundhausen, M., Ley, L., Semmelroth, K., Schmid, F., Pensl, G., Nagasawa, H. Trans Tech Publications
5 Conference Proceedings New Insight in Scandium-Mediated Growth Techniques: Sc-Related Defects in 4H-SiC and 6H-SiC U. Gerstmann, S. Greulich-Weber, E. Rauls, J.M. Spaeth, E.N. Kalabukhova, E.N. Mokhov, F. Mauri Trans Tech Publications	11 Conference Proceedings Annealing Study on Radiation-Induced Defects in 6H-SiC Pinheiro, M.V.B., Lingner, T., Caudepon, F., Greulich-Weber, S., Spaeth, J.M. Trans Tech Publications
6 Conference Proceedings Growth of 3C-SiC Bulk Material by the Modified Lely Method Semmelroth, K., Krieger, M., Pensl, G., Nagasawa, H., Puesche, R., Hundhausen, M., Ley, L., Nerding, M., Strunk, H.P. Trans Tech Publications	12 Conference Proceedings Radiation-Induced Pair Defects in 6H-SiC Studied by Optically Detected Magnetic Resonance Lingner, T., Greulich-Weber, S., Spaeth, J.-M. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12