A Comparative Study of the Electrical Properties of 4H-SiC Epilayers with Continuous and Dissociated Micropipes
- Author(s):
- Publication title:
- Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001
- Title of ser.:
- Materials science forum
- Ser. no.:
- 389-393
- Pub. Year:
- 2002
- Page(from):
- 1137
- Page(to):
- 1140
- Pages:
- 4
- Pub. info.:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878498949 [087849894X]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A Comparative Study of the Electrical Properties of 4H-SiC Epilayers with Continuous and Dissociated Micropipes
Trans Tech Publications |
Trans Tech Publications |
2
Conference Proceedings
Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers
Trans Tech Publications |
Trans Tech Publications |
3
Conference Proceedings
Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Materials Research Society |
11
Conference Proceedings
Homoepitaxial Growth and Characterization of Thick SiC Layers With a Reduced Micropipe Density
Materials Research Society |
6
Conference Proceedings
Micropipe Closing via Thick 4H-SiC Epitaxial Growth Involving Structural Transformation of Screw Dislocations
Trans Tech Publications |
Trans Tech Publications |