Blank Cover Image

Investigation of Residual Impurities in 4H-SiC Epitaxial Layers Grown by Hot-Wall Chemical Vapor Deposition

Author(s):
Nishio, J.
Kushibe, M.
Masahara, K.
Kojima, K.
Ohno, T.
Ishida, Y.
Takahashi, T.
Suzuki, T.
Tanaka, T.
Yoshida, S.
Arai, K.
6 more
Publication title:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001
Title of ser.:
Materials science forum
Ser. no.:
389-393
Pub. date:
2002
Page(from):
215
Page(to):
218
Pages:
4
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498949 [087849894X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

Nishio, J., Kushibe, M., Masahara, K., Kojima, K., Ohno, T., Ishida, Y., Takahashi, T., Suzuki, T., Tanaka, T., Yoshida, …

Trans Tech Publications

Kojima, K., Ohno, T., Suzuki, S., Senzaki, J., Harada, S., Fukuda, K., Kushibe, M., Masahara, K., Ishida, Y., Takahashi, …

Trans Tech Publications

Masahara, K., Takahashi, T., Kushibe, M., Ohno, T., Nishio, J., Kojima, K., Ishida, Y., Suzuki, T., Tanaka, T., Yoshida, …

Trans Tech Publications

Hasegawa, M., Miyauchi, A., Masahara, K., Ishida, Y., Takahashi, T., Ohno, T., Nishio, J., Suzuki, T., Tanaka, T., …

Trans Tech Publications

Masahara, K., Takahashi, T., Kushibe, M., Ohno, T., Nishio, J., Kojima, K., Ishida, Y., Suzuki, T., Tanaka, T., Yoshida, …

Trans Tech Publications

Hasegawa, M., Miyauchi, A., Masahara, K., Ishida, Y., Takahashi, T., Ohno, T., Nishio, J., Suzuki, T., Tanaka, T., …

Trans Tech Publications

Kushibe, M., Ishida, Y., Okumura, H., Takahashi, T., Masahara, K., Ohno, T., Suzuki, T., Tanaka, T., Yoshida, S., Arai, …

Trans Tech Publications

Kojima, K., Takahashi, T., Ishida, Y., Kuroda, S., Okumura, H., Arai, K.

Trans Tech Publications

Masahara, K., Kushibe, M., Ohno, H., Kojima, K., Takahashi, T., Ishida, Y., Suzuki, T., Tanaka, T., Yoshida, S., Arai, …

Trans Tech Publications

Ohno, T., Yamaguchi, H., Kojima, K., Nishio, J., Masahara, K., Ishida, Y., Takahashi, T., Suzuki, T., Yoshida, S.

Trans Tech Publications

Kojima, K., Ohno, T., Suzuki, S., Senzaki, J., Harada, S., Fukuda, K., Kushibe, M., Masahara, K., Ishida, Y., Takahashi, …

Trans Tech Publications

Ohno, T., Yamaguchi, H., Kojima, K., Nishio, J., Masahara, K., Ishida, Y., Takahashi, T., Suzuki, T., Yoshida, S.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12