Electrical Characterization of Nickel Silicide Contacts on Silicon Carbide

Electrical Characterization of Nickel Silicide Contacts on Silicon Carbide

Author(s):

Publication title:

Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001

Title of ser.:

Materials science forum

Ser. no.:

389-393

Pub. Year:

2002

Page(from):

893

Page(to):

896

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498949 [087849894X]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013330
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2001
Conf. info. (Venue):	Tsukuba, Japan
Conf. info. (Date):	2001.10.28-2001.11.02

Similar Items:

1 Conference Proceedings Electrical Characterization of Nickel Silicide Contacts on Silicon Carbide Roccaforte, F., La Via, F., Raineri, V., Musumeci, P., Calcagno, L. Trans Tech Publications	7 Conference Proceedings Activation Study of Implanted N+ in 6H-SiC by Scanning Capacitance Microscopy Raineri, V., Calcagno, L., Giannazzo, F., Goghero, D., Musumeci, F., Roccaforte, F., La Via, F. Trans Tech Publications
2 Conference Proceedings Schottky-Ohmic Transition in Nickel Silicide/SiC System: Is it Really a Solved Problem? Calcagno, L., Zanetti, E., La Via, F., Roccaforte, F., Raineri, V., Libertino, S., Giannazzo, F., Mauceri, M., Musumeci, … Trans Tech Publications	8 Conference Proceedings Ion-Irradiation Effect on the Ni/SiC Interface Reaction Roccaforte, F., Calcagno, L., Musumeci, P., Via, F. La Trans Tech Publications
3 Conference Proceedings Schottky-Ohmic Transition in Nickel Silicide/SiC-4H System: the Effect of Non Uniform Schottky Barrier Via, F. La, Roccaforte, F., Raineri, V., Mauceri, M., Ruggiero, A., Musumeci, P., Calcagno, L. Trans Tech Publications	9 Conference Proceedings Electrical Characterization of Inhomogeneous Ni2/Si/SiC Schottky Contacts Roccaforte, F., La Via, F., Raineri, V., Pierobon, R., Zanoni, E. Trans Tech Publications
4 Conference Proceedings Effects of Thermal Treatments on the Structural and Electrical Properties of Ni/Ti Bilayers Schottky Contacts on 6H-SiC Roccaforte, F., La Via, F., Baeri, A., Raineri, V., Calcagno, L., Mangano, F. Trans Tech Publications	10 Conference Proceedings Role of H2 in Low Temperature Post-Oxidation Anneal for Gate Oxide on 6H-SiC Raineri, V., Lombardo, S., Musumeci, P., Maktari, A.M., Calcagno, L. Trans Tech Publications
5 Conference Proceedings Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy Raineri, V., Giannazzo, F., Calcagno, L., Musumeci, P., Roccaforte, F., La Via, F. Trans Tech Publications	11 Conference Proceedings Defects in He+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements Ruggiero, A., Libertino, S., Mauceri, M., Reitano, R., Musumeci, P., Roccaforte, F., La Via, F., Calcagno, L. Trans Tech Publications
6 Conference Proceedings Quantitative High-Resolution Two-Dimensional Profiling of SiC by Scanning Capacitance Microscopy Raineri, V., Giannazzo, F., Calcagno, L., Musumeci, P., Roccaforte, F., La Via, F. Trans Tech Publications	12 Conference Proceedings Correlation between Leakage Current and Ion-Irradiation Induced Defects in 4H-SiC Schottky Diodes Raineri, V., Roccaforte, F., Libertino, S., Ruggiero, A., Massimino, V., Calcagno, L. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12