Blank Cover Image

Masking Process for High-Energy and High-Temperature Ion Implantation

Author(s):
Ohyanagi, T.
Onose, H.
Watanabe, A.
Someya, T.
Ohno, T.
Amemiya, K.
Kobayashi, Y.
2 more
Publication title:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001
Title of ser.:
Materials science forum
Ser. no.:
389-393
Pub. Year:
2002
Page(from):
867
Page(to):
870
Pages:
4
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498949 [087849894X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

Ohyanagi, T., Onose, H., Watanabe, A., Someya, T., Ohno, T., Amemiya, K., Kobayashi, Y.

Trans Tech Publications

Ohno, T., Kobayashi, N.

Trans Tech Publications

Ohyanagi, T., Ohno, T., Amemiya, K., Watanabe, A.

Trans Tech Publications

3 Conference Proceedings 2 kV 4H-SiC Junction FETs

Onose, H., Watanabe, A., Someya, T., Kobayashi, Y.

Trans Tech Publications

Kishimoto, T., Sayama, H., Takai, M., Ohno, Y., Sonoda, K., Nishimura, T., Kinomura, A., Horino, Y., Fujii, K.

MRS - Materials Research Society

4 Conference Proceedings 2 kV 4H-SiC Junction FETs

Onose, H., Watanabe, A., Someya, T., Kobayashi, Y.

Trans Tech Publications

Terashima,K., Ikarashi,T., Watanabe,M., Kitano,T.

Trans Tech Publications

Ohno, T., Amemiya, K.

Trans Tech Publications

Ohno, Toshiyuki, Kobayashi, Naoto

Materials Research Society

Ohno, T., Amemiya, K.

Trans Tech Publications

H. Shimizu, Y. Onose, T. Someya, H. Onose, N. Yokoyama

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12