Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Author(s):

Sartel, C.

Publication title:

Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001

Title of ser.:

Materials science forum

Ser. no.:

389-393

Pub. Year:

2002

Page(from):

263

Page(to):

266

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498949 [087849894X]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013330
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2001
Conf. info. (Venue):	Tsukuba, Japan
Conf. info. (Date):	2001.10.28-2001.11.02

Similar Items:

1 Conference Proceedings Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS Sartel, C., Souliere, V., Dazord, J., Monteil, Y., El-Harrouni, I., Bluet, J.M., Guillot, G. Trans Tech Publications	7 Conference Proceedings Boron Doping during Vapor-Liquid-Solid Growth of Homoepitaxial 4H-SiC Layers M. Soueidan, G. Ferro, B. Nsouli, N. Habka, V. Souliere, G. Younes, K. Zahraman, J.M. Bluet, Y. Monteil Trans Tech Publications
2 Conference Proceedings Characterization of Homoepitaxial 4H-SiC Layer Grown from Silane/Propane System Sartel, C., Bluet, J.M., Souliere, V., El-Harrouni, I., Monteil, Y., Mermoux, M., Guillot, G. Trans Tech Publications	8 Conference Proceedings Optical Characterization of Full SiC Wafer El Harrouni, I., Bluet, J.M., Ziane, D., Mermoux, M., Baillet, F., Guillot, G. Trans Tech Publications
3 Conference Proceedings Aluminum Doping of 4H-SiC Grown with HexaMethylDiSilane Sartel, C., Souliere, V., Zielinski, M., Monteil, Y., Camassel, J., Rushworth, S. Trans Tech Publications	9 Conference Proceedings Application of UV Scanning Photoluminescence Spectroscopy for Minority Carrier Lifetime Mapping Masarotto, L., Bluet, J.M., El Harrouni, I., Guillot, G. Trans Tech Publications
4 Conference Proceedings Comparative Studies of <0001> 4H-SiC Layers Grown with Either Silane or HexaMethylDisilane / Propane Precursor Systems Sartel, C., Balloud, C., Souliere, V., Juillaguet, S., Dazord, J., Monteil, Y., Camassel, J., Rushworth, S. Trans Tech Publications	10 Conference Proceedings Dilute Aluminium Concentration in 4H-SiC: from SIMS to LTPL Measurements Juillaguet, S., Zielinski, M., Balloud, C., Sartel, C., Consejo, C., Boyer, B., Souliere, V., Camassel, J., Monteil, Y. Trans Tech Publications
5 Conference Proceedings Investigation of <1,1,-2,0> Epitaxial Layers Grown on a-Cut 4H-SiC Substrates Blanc, C., Sartel, C., Souliere, V., Juillaguet, S., Monteil, Y., Camassel, J. Trans Tech Publications	11 Conference Proceedings Optical Investigation of Cubic SiC Layers Grown on Hexagonal SiC Substrates by CVD and VLS N. Habka, V. Souliere, J.M. Bluet, M. Soueidan, G. Ferro, Y. Monteil Trans Tech Publications
6 Conference Proceedings Evaluation of p-Type Doping for (1120) Epitaxial Layers Grown on α-Cut (1120) 4H-SiC Substrates Blanc, C., Zielinski, M., Souliere, V., Sartel, C., Juillaguet, S., Contreras, S., Camassel, J., Monteil, Y. Trans Tech Publications	12 Conference Proceedings UV Scanning Photoluminescence Spectroscopy Investigation of 6H- and 4H-SiC Masarotto, L., Bluet, J.M., Guillot, G. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12