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Doping of Silicon Carbide by Ion Implantation

Author(s):
Svensson, B.G.
Hallen, A.
Linnarsson, M.K.
Kuznetsov, A.Yu.
Janson, M.S
Aberg, D.
Oesterman, J.
Persson, P.O.A.
Hultman, L.
Storasta, L.
Carlsson, F.H.C.
Bergman, J.P.
Jagadish, C.
Morvan, E.
9 more
Publication title:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000
Title of ser.:
Materials science forum
Ser. no.:
353-356
Pub. date:
2001
Page(from):
549
Page(to):
554
Pages:
6
Pub. info.:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498734 [0878498737]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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