Porous Low-k Dielectrics: Material Properties | 東京工業大学附属図書館文献データベース

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Porous Low-k Dielectrics: Material Properties

Author(s):

Sankarapandian, M.

Publication title:

Polymers for microelectronics and nanoelectronics

Title of ser.:

ACS symposium series

Ser. no.:

874

Pub. Year:

2004

Page(from):

161

Page(to):

172

Pages:

12

Pub. info.:

Washington, D.C.: American Chemical Society

ISSN:

00976156

ISBN:

9780841238572 [084123857X]

Language:

English

Call no.:

A05800/874

Type:

Conference Proceedings

Details

TDL ID:	ZA00013176
Series ID:	PA00000004
Conf. info. (Name):	American Chemical Society (ACS) symposium
Conf. info. (Number):	224th
Conf. info. (Venue):	Boston MA, USA
Conf. info. (Date):	2002.08.18-2002.08.22

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