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Nanoporous, Low-Dielectric Constant Organosilicate Materials Derived from Inorganic Polymer Blends

Author(s):
Miller, R.D.
Volksen, W.
Lee, V.Y.
Conner, E.
Magbitang, T.
Zafran, R.
Sundberg, L.
Hawker, C.J.
Hedrick, J.L.
Huang, E.
Tooney, M.
Huang, Q.R.
Frank, C.W.
Kim, H.-C.
9 more
Publication title:
Polymers for microelectronics and nanoelectronics
Title of ser.:
ACS symposium series
Ser. no.:
874
Pub. Year:
2004
Page(from):
144
Page(to):
160
Pages:
17
Pub. info.:
Washington, D.C.: American Chemical Society
ISSN:
00976156
ISBN:
9780841238572 [084123857X]
Language:
English
Call no.:
A05800/874
Type:
Conference Proceedings

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