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Author(s):
Kwon, Heung-Kyu ( Samsung Electronics Co., Ltd. )
Cho, Tae-Je
Kim, Se-Nyun
Choi, Ki-Won
Im, Yun-Hyeok
Kim, Nam-Seog
Lee, Heeseok
Shin, Dong-Kil
Lee, Seung-Bae
Shim, Jong-Bo
Yoon, Ki-Myong
Oh, Se-Yong
7 more
Publication title:
Proceedings, 2003 International Symposium on Microelectronics, November 18-20, 2003, Hynes Convention Center, Boston, Massa Massachusetts, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5288
Pub. Year:
2003
Page(from):
223
Page(to):
228
Pages:
6
Pub. info.:
Reston, Va.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819451897 [0819451894]
Language:
English
Call no.:
P63600/5288
Type:
Conference Proceedings

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