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High-speed precision surface profilometry using large phase shifting

Author(s):
Publication title:
Optomechatronic Systems IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5264
Pub. Year:
2003
Page(from):
322
Page(to):
331
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819451521 [0819451525]
Language:
English
Call no.:
P63600/5264
Type:
Conference Proceedings

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