Piezoresistive pressure sensors in CVD diamond for high-temperature applications

Piezoresistive pressure sensors in CVD diamond for high-temperature applications

Author(s):

Otterbach, R. ( Univ. of Paderborn (Germany) )
Hilleringmann, U.

Publication title:

Fifth International Symposium on Instrumentation and Control Technology : 24-27 October 2003, Beijing, China

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5253

Pub. Year:

2003

Page(from):

381

Page(to):

384

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819451378 [0819451371]

Language:

English

Call no.:

P63600/5253

Type:

Conference Proceedings

Details

TDL ID:	ZA00013169
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Instrumentation and Control Technology
Conf. info. (Number):	2003 : 5th
Conf. info. (Venue):	Beijing, China
Conf. info. (Date):	2003.10.24-2003.10.27

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