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Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertainty

Author(s):
  • Takatsuji, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
  • Osawa, S.
  • Kuriyama, Y. ( Mitutoyo Corp. (Japan) )
  • Kurosawa, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Publication title:
Recent Developments in Traceable Dimensional Measurements II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5190
Pub. Year:
2003
Page(from):
431
Page(to):
439
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450630 [0819450634]
Language:
English
Call no.:
P63600/5190
Type:
Conference Proceedings

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