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Grating fabrication through x-ray lithography

Author(s):
Mouroulis, P.Z. ( Jet Propulsion Lab. (USA) )
Hartley, F.T. ( Jet Propulsion Lab. (USA) )
Muller, R.E. ( Jet Propulsion Lab. (USA) )
Wilson, D.W. ( Jet Propulsion Lab. (USA) )
Shori, A. ( Louisiana State Univ. (USA) )
Feldman, M. ( Louisiana State Univ. (USA) )
Jiang, L. ( Louisiana State Univ. (USA) )
Christenson, T.R. ( Sandia National Labs. (USA) )
3 more
Publication title:
Current developments in lens design and optical engineering IV : 3-4 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5173
Pub. Year:
2003
Page(from):
108
Page(to):
114
Pages:
7
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450463 [0819450464]
Language:
English
Call no.:
P63600/5173
Type:
Conference Proceedings

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