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In-plane optical measurement of vibrations of MEMS: gradient methods using interferometry and image processing

Author(s):
Publication title:
Microsystems Engineering: Metrology and Inspection III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5145
Pub. Year:
2003
Page(from):
161
Page(to):
168
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450159 [0819450154]
Language:
English
Call no.:
P63600/5145
Type:
Conference Proceedings

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