Blank Cover Image

MEMS deep-RIE fabrication process and device characterization

Author(s):
  • Li, J. ( Nanyang Technological Univ. (Singapore) )
  • Zhang, Q.X. ( Institute of Microelectronics (Singapore) )
  • Asundi, A.K. ( Nanyang Technological Univ. (Singapore) )
  • Liu, A.Q. ( Nanyang Technological Univ. (Singapore) )
Publication title:
Microsystems Engineering: Metrology and Inspection III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5145
Pub. Year:
2003
Page(from):
80
Page(to):
86
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819450159 [0819450154]
Language:
English
Call no.:
P63600/5145
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Hybrid reconfigurable OADM using MEMS switch and FBG

Li, J., Liu, A.Q., Zhang, Q.X., Balasubramanian, N., Lu, C.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Micromachined variable optical attenuator (VOA)

Li, J., Zhang, X.M., Liu, A.Q., Zhang, Q.X., Mei, T.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Photonic bandgap crystals: a breakthrough for new-generation integrated optical device (Invited Paper)

Liu, A.Q., Asundi, A.K.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Application of deep-trench LISA technology on optical switch fabrication

Zhang, Q., Li, J., Miao, Y., Liu, A.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Fabrication and characterization of Si nanotip arrays for Si-based nano-devices

X. Zhang, K. Liu, K. Chen, J. Xu, Z. Ma

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Integrated add/drop multiplexer (ADM) using micromachined mirror

Li, J., Zhang, Q.X., Balasubramanian, N., Huang, J.M., Liu, A.Q.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Fabrication and characterization of high-speed integrated electro-optic lens and scanner devices

K.T.Gahagan, Gopalan,V., Robinson,J.M., Jia,Q.X., Mitchell,T.E., Kawas,M.J., Schlesinger,T.E., Stancil,D.D.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Industrial applications of residual stress determination using 2D in-plane sensitive fiber ESPI and hole drilling

Asundi,A.K., Zhang,J.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Research of a Novel MEMS Vector Hydrophone Based on a New Package Process

K.R. Zhang, Q.Z. Li, G.W. Liu, X.J. Shi

Trans Tech Publications
11 Conference Proceedings Characterization of microstructures with in-line digital micro-holo-interferometry

Xu,L., Peng,X., Miao,J., Asundi,A.K.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings MEMS optical switch control and integrated packaging

Cai, H., Chan, C.W., Wang, Y.X., Lu, C., Asundi, A.K., Liu, A.Q.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Automated full-field interferometric characterization of micromachined silicon membrane

Xu, L., Peng, X., Miao, J., Asundi, A.K.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12